Fig. 3

Device mount. a 3D design of the vacuum packaging with optical and fluidic access. b Modular chip holder with 4 stainless steel tubes inserted (top), with 4 O-rings placed (middle), and with a microfluidic resonator chip (bottom). The size of the individual resonator chip is 5 mm by 5 mm. c Before and after the upper (black) and lower (beige) clamp parts are assembled