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Table 1 Thickness of each layer of the particle sensor

From: MEMS particle sensor based on resonant frequency shifting

No

Material deposited from the bottom

(μm)

8

Silicon dioxide, dielectric layer (SiO2)

0.2

7

Platinum, top electrode (Pt)

0.2

6

Titanium, adhesion layer (Ti)

< 5 nm

5

Aluminum nitride (AlN)

1.0

4

Platinum, top electrode (Pt)

0.2

3

Titanium, adhesion layer (Ti)

< 5 nm

2

Silicon dioxide, dielectric layer (SiO2)

0.2

1

Silicon nitride, backside etch stop layer (SiNx)

1.0