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Table 1 Thickness of each layer of the particle sensor

From: MEMS particle sensor based on resonant frequency shifting

No Material deposited from the bottom (μm)
8 Silicon dioxide, dielectric layer (SiO2) 0.2
7 Platinum, top electrode (Pt) 0.2
6 Titanium, adhesion layer (Ti) < 5 nm
5 Aluminum nitride (AlN) 1.0
4 Platinum, top electrode (Pt) 0.2
3 Titanium, adhesion layer (Ti) < 5 nm
2 Silicon dioxide, dielectric layer (SiO2) 0.2
1 Silicon nitride, backside etch stop layer (SiNx) 1.0