Multidirectional UV-LED lithography using an array of high-intensity UV-LEDs and tilt-rotational sample holder for 3-D microfabrication

Shiba, Sabera Fahmida; Tan, Jun Ying; Kim, Jungkwun

doi:10.1186/s40486-020-00107-y

Micro and Nano Systems Letters

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Last updated: Fri, 19 Apr 2024 8:16:47 Z

Multidirectional UV-LED lithography using an array of high-intensity UV-LEDs and tilt-rotational sample holder for 3-D microfabrication

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