Fig. 10From: Multidirectional UV-LED lithography using an array of high-intensity UV-LEDs and tilt-rotational sample holder for 3-D microfabricationSmall feature size, and high aspect ratio pillar, millimeter tall high aspect ratio pillar: a 3.5 and 8 micron lines, b high aspect ratio micropillar, c 3-mm tall micropillar, d more than 2000 micropillar arrayBack to article page