Structure type | Geometrical parameters | |||||
---|---|---|---|---|---|---|
Width of Si master (W1) [μm] | Width of Si substrate (W2) [μm] | Width of structure (Ws) [μm] | Distance between structures (d) [μm] | Height (h) [μm] | Angle of parallelogram structure (θ) [°] | |
Type 1 | 40 | 140 | 100 | 100, 150, 200, 250, 300 | 25 | 54.7 |
Type 2 | 40 | 240 | 200 |