Table 2 MEMS-enabled 3D imaging system comparison summary

Stereoscopic vision (multiple view from 7 LC lens)

Device size: 1.4 mm in diameter

Packaging size: 3.5 mm in diameter (endoscopy)

Focal lengths from 25 to 240 mm

–

Focus-tunable endoscopy

Hassanfiroozi et al. [27], Optics Express

Stereoscopic vision (multiple view from 3 LC lens)

Device size: 1.42 mm in diameter

Packaging size: 2.5 mm in diameter (endoscopy)

Focal lengths from 80 mm to infinity

2D/3D switching time: 1.5 s

2D/3D switchable and focus-tunable endoscopy

Hassanfiroozi et al. [28], Optics Express

Stereoscopic vision (temporal division)

Device size: 3.4 mm × 3.3 mm × 1 mm

3D demonstrated from 65 to 120 mm in distance

Actuating frequency: 136 Hz

–

Jang et al. [29], Optics Express

Stereoscopic vision (split by refraction)

Device size: 5 mm × 5 mm

3D demonstrated from 10 to 100 mm in distance

–

3D endoscopy

Yang et al. [30], Optics Letters

Structured light (MEMS mirror immersed in oil)

Device size: 3.2 mm × 3.2 mm

3D demonstrated at entire 30 in

Actuating frequency: up to 70 Hz

–

Zhang et al. [31], Optics Express

Structured light (combination with MEMS mirror and diffractive structure)

Device size: 1 mm in diameter

Structured light projected at 30 cm, 50 cm distance

MEMS mirror actuating frequency: 25.5 kHz/camera framerate: 30 fps

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Carpignano et al. [32], J. Disp. Tech.

Merlo et al. [33], IEEE_

Structured light (variable light patterns)

Device size: 1.2 mm × 1.2 mm × 0.43 mm

–

Actuating frequency: f_x 5950–6006 Hz

f_y 6800–6798 Hz

–

Seo et al. [34], IEEE OMN 2018

Stereoscopic with structured light (64 × 64 Dammann grating)

Packaging size: 170 g weigh with 14 cm width

Measuring distance at 150 mm

Camera framerate: up to 15 fps

Handily scannable module

Wei et al. [36], Applied Optics

Structured light (designed transmission DOE and patterned VCSEL array)

Device size: adjustable by glass wafer cutting

–

–

–

Lyu et al. [37], SPIE Optical Design and Engineering VII

Structured light (diffractive lens, beam shaper, and Damman beam splitter combined DOE)

–

Measuring distance at 1 m

–

–

Barlev et al. [38], Optics Express

Time-of-flight (2-axis scanning MEMS based laser scanning)

Sensor chip size: 8 mm × 5 mm

Measured distance range up to 20 m

Frame rate: 10 fps

LIDAR system

Niclass et al. [39], Optics Express

Time-of-flight (optical shutter with multi-layered optical resonance cavity and electro-absorptive layers)

Device size: 7.3 mm × 5.5 mm

3D demonstrated from 1 to 3 m in distance

Optical shutter modulation frequency: 20 MHz

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Park et al. [40], SPIE MOEMS-MEMS 2012

Park et al. [41], SPIE MOEMS-MEMS 2014