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Fig. 4 | Micro and Nano Systems Letters

Fig. 4

From: Optical MEMS devices for compact 3D surface imaging cameras

Fig. 4

Structured light system by diffraction generation from laser transmission through grating structures; a binocular 3D imaging system using a structured light projector with a Dammann grating and captured diffraction patterns by a designed Dammann grating (inset) [35, 36]. b Structured light projector with a DOE designed by the Gerchberg–Saxton algorithm and patterned VCSEL arrays. Their projected dot array pattern is shown at the bottom line with fabricated DOE (inset) [37]. c Multifunctional binary DOE in combination with diffractive lens, Gaussian-to-tophat beam shaper, and Dammann grating. Their projected tophat line array pattern is shown at the bottom line with fabricated DOE (inset) [38]

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