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Micro and Nano Systems Letters
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Fig. 3 | Micro and Nano Systems Letters

Fig. 3

From: Polymer-based flexible and multi-directional tactile sensor with multiple NiCr piezoresistors

Fig. 3

Fabrication process flow of the polymer-based flexible and multi-directional tactile sensor. NiCr piezoresistors and double-layered metal lines are patterned via conventional microfabrication, including photolithography, evaporation, sputtering, plasma etching, and a lift-off process. Then, the PI film with sensor components is detached from the wafer. Finally, the PDMS bump that is fabricated separately is assembled with the main structure

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