Fig. 3
From: Polymer-based flexible and multi-directional tactile sensor with multiple NiCr piezoresistors
Fabrication process flow of the polymer-based flexible and multi-directional tactile sensor. NiCr piezoresistors and double-layered metal lines are patterned via conventional microfabrication, including photolithography, evaporation, sputtering, plasma etching, and a lift-off process. Then, the PI film with sensor components is detached from the wafer. Finally, the PDMS bump that is fabricated separately is assembled with the main structure