Fig. 2From: Microstructure-based analysis of fine metal mask cleaning in organic light emitting diode display manufacturingThe microfabrication process flow: a SiO2 patterning and etching, b thick PR patterning, c Si reactive ion etching, d Si reactive ion etching after PR removal and SiO2 removal, and e anodic bonding of the sand-blasting etched glass substrate on the Si microstructureBack to article page