Fig. 9From: Photolithography of SU-8 microtowers for a 100-turn, 3-D toroidal microinductor100-turn toroidal microinductor, a bottom and vertical winding, outer diameter is 8 mm; b inner vertical winding, height is about 1000 µm; c outer vertical winding, the height is about 1000 µm; and d a batch fabrication of 100-turn toroidal inductorsBack to article page