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Micro and Nano Systems Letters

Table 1 Responses to methane and hydrogen gas concentrations of fabricated catalytic combustible type single-chip micro gas sensors with two different Pt heater thicknesses and input powers

From: Methane and hydrogen sensing properties of catalytic combustion type single-chip micro gas sensors with two different Pt film thicknesses for heaters

Input

Output

Pt heater thickness (nm)

Input power (mW)

CH4 concentration response

H2 concentration response

ppm

mV

ppm

mV

150

112

2315

0.192

282

0.949

3472

0.326

424

1.350

4630

0.367

565

1.900

5787

0.438

706

2.496

450

128

2315

1.076

282

0.965

3472

1.719

424

1.480

4630

2.164

565

1.959

5787

2.433

706

2.514

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