Fig. 3From: Methane and hydrogen sensing properties of catalytic combustion type single-chip micro gas sensors with two different Pt film thicknesses for heatersGas response properties of catalytic combustible type single-chip micro gas sensors to varying concentrations of CH4 and H2 gases: a, b one micro gas sensor with 150 nm thick heater, c, d three micro gas sensors with 450 nm thick heatersBack to article page