Skip to main content
Micro and Nano Systems Letters
Fig. 1 | Micro and Nano Systems Letters

Fig. 1

From: Methane and hydrogen sensing properties of catalytic combustion type single-chip micro gas sensors with two different Pt film thicknesses for heaters

Fig. 1

Images of the catalytic combustible type single-chip micro gas sensor platforms: top view of fabricated micro gas sensor platforms without catalyst materials (a) and with catalyst materials only on the right-hand side membrane (c). b, d Schematic views of the cross-section structures of a and c. e Image of single-chip micro gas sensor platform c packaged on TO-8. f Top image of fabricated Pt micro heater in single-chip micro gas sensor platform

Back to article page