Table 1 Ar ion beam incident angles investigated in Ar IBE process
From: Fabrication of an Au–Au/carbon nanotube-composite contacts RF-MEMS switch
Condition | Base metal layer | Sacrificial layer | Dimple | Seed layer |
|---|---|---|---|---|
1 | 0° | 0° | 0° | 0° |
2 | 45° | 45° | 45° | 45° |
3 | 45° | 45° | 45° | 0° |