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Fig. 4 | Micro and Nano Systems Letters

Fig. 4

From: Highly controllable and reliable ultra-thin Parylene deposition

Fig. 4

Uniformity of the present effusion-based ultra-thin Parylene deposition. a Photos of the so-deposited ultra-thin Parylene films on 4-inch silicon wafers. The values of thicknesses were shown on bottom of the wafers. The patterns on the wafer II, III, and IV with different colors were the shadows of the ceiling in the clean room and did not actually exist on the wafers. b Numerical result of the monomer pressure distributions in the deposition chambers of different sized orifices. The inset shows a typical monomer pressure distribution inside the deposition chamber

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