Micro and Nano Systems Letters

Table 1 Gas response results of SnO₂ gas sensor with Pt T sensor to 25 ppm CO and 1 ppm HCHO gases

From: Temperature control of micro heater using Pt thin film temperature sensor embedded in micro gas sensor

R (Ω)	T (°C)	mW	Gas response
CO 25 ppm
132	210	17.6	1.13
142	275	24.3	1.24
152	340	32	2.10
160	391	39.6	2.68
HCHO 1 ppm
132	210	17.6	1.26
142	275	24.3	1.69
152	340	32	4.72
160	391	39.6	4.82

Back to article page