Table 1 Dimensional parameters
From: Linear frequency tuning in an LC-resonant system using a C–V response controllable MEMS varactor
Parameters | Values |
|---|---|
gcap | 1 μm |
gtune | 1.4 μm |
l3 | 560 μm |
l 2 | 360 μm |
l 0_tune | 10 μm |
l 1_tune | 80 μm |
l 0_control | 50 μm |
l 1_control | 100 μm |
b | 500 μm |
w | 10 μm |
t | 11 μm |
l | 100 μm |
G | 10 GPa |