Fig. 3From: Linear frequency tuning in an LC-resonant system using a C–V response controllable MEMS varactorAnalysis of parameters that determine the linearity of C–V response. a 3D plot for the coefficient of second order term in Taylor series. b Top view of (a) showing the cross points with C 2 = 0 plane are the same in every case. c l 3 and pull-in voltage in the case of g cap = 1 μmBack to article page