Fig. 3From: Micro-fabricated flexible PZT cantilever using d33 mode for energy harvestingFabrication of flexible PZT based energy harvester: a deposition of SiNx/LTO, PZT/PbTiO3 and Pt on Si wafer, b Pt etching for IDT electrodes, c PZT wet etching, d depositing and defining the cantilever by using photo-definable polyimide, e KOH wet etching to form the proof mass, f SiNx/LTO etching by RIE for releaseBack to article page