Fig. 6From: Realization of large-scale sub-10 nm nanogratings using a repetitive wet-chemical oxidation and etching techniqueDemonstration of the inch-scale sub-10 nm nanogratings. a Optical image of the large substrate, 2.0 cm × 2.5 cm after 15 cycles, and SEM images of a top view of the corresponding areas numbered in the optical image. b Difference in size deviation between before and after 15 cycles for each numbered position (Additional file 2)Back to article page