Table 1 Experimental conditions of Ni–B and Ni–Co MEMS probes
From: MEMS-based Ni–B probe with enhanced mechanical properties for fine pitch testing
Test | Conditions |
|---|---|
Contact force | Overdrive: 0–700 µm (25 µm) |
Contact deflection | Overdrive: 150, 300, 450 µm Time: 60 min/step |
Thermal effect | Temperature: 23 ± 5, 95.5 ± 5 °C Overdrive and time: same as above |