Fig. 6From: MEMS-based Ni–B probe with enhanced mechanical properties for fine pitch testingEffect of temperature. a Contact force of Ni–B MEMS probes at RT (23 ± 5 °C) and high temperature (95.5 ± 5 °C) and b permanent deformation of the Ni–Co and Ni–B MEMS probes at different temperaturesBack to article page