Microscanners for optical endomicroscopic applications

Hwang, Kyungmin; Seo, Yeong-Hyeon; Jeong, Ki-Hun

doi:10.1186/s40486-016-0036-4

Micro and Nano Systems Letters

Table 1 Microscanner comparison summary

From: Microscanners for optical endomicroscopic applications

Packaging configuration	Scanning arrangement	Scanning trajectories	Actuation mechanism	Author (year), Journal	Applications (ref)
Side-viewing	Pre-objective	Line	1D electrostatic MEMS mirror scanner	Zara (2003), OL	OCT [25]
	Pre-objective	Line	Micro motor	Adler (2007), Nat Photo	OCT [45]
	Post-objective	Line	1D electrostatic MEMS mirror scanner	Toshiyoshi (2011), ISOP	OCT [31]
		Raster	2D electromagnetic MEMS mirror scanner	Kim (2007), OPEX	SD-OCT [22]
			2D electrostatic MEMS mirror scanner	Aguirre (2007), OPEX	OCT [27]
			2D electrothermal MEMS mirror scanner	Wang (2013), BOE	OCT [38]
		Lissajous	2D electrothermal MEMS mirror scanner	Sun (2010), OPEX	OCT [37]
Forward-viewing	Pre-objective	Line	Quarter-tubular piezoelectric actuator based fiber scanner	Liu (2004), OL	OCT [20]
			1D electrothermal MEMS mirror scanner	Pan (2001), OL	OCT [34]
			1D electrothermal MEMS mirror scanner	Xie (2003), EL	OCT [35]
		Spiral	Quarter-tubular piezoelectric actuator based fiber scanner	Myaing (2006), OL	TPF [7]
				Meinert (2014), OPEX	Confocal reflectance imaging [16]
				Lurie (2015), OL	OCT-SFE [17]
				Zhang (2014), OL	SS-OCT [18]
				Xi (2012), OL	OCT-TPF [19]
		Raster	Piezoelectric actuator based fiber scanner	Rivera (2011), PNAS	TPF/SHG [10]
			Quarter-tubular piezoelectric actuator based fiber scanner	Do (2014), JBO	TPF [12]
			2D electromagnetic MEMS lens scanner	Siu (2007), OPEX	OCT/Confocal imaging/TPF [21]
			2D Electrostatic MEMS mirror scanner	Kumar (2010), BM	Confocal imaging [23]
			2D electrothermal MEMS mirror scanner	Jain (2004), JSTQ	OCT [36]
			Two pair of 1D electrothermal MEMS mirror scanners for each axis	Duan (2014), ISBI	SS-OCT [39]
		Lissajous	Quarter-tubular piezoelectric actuator based fiber scanner	Liang (2012), JBO	TPF [8]
				Park (2014), OPEX	OCT [9]
				Park (2014), OL	OCT [14]
			Electrostatic MEMS lens scanner	Park (2012), OL	OCT [13]
			2D electrothermal MEMS fiber scanner	Seo (2016), OPEX	OCT [15]
	Post-objective	Raster	2D electrostatic MEMS mirror scanner	Ra (2008), OPEX	Confocal imaging [30]
	Post-objective	Lissajous	Two pair of 1D electrostatic MEMS mirror scanners for each axis	Liu (2010), JBO	Confocal imaging [29]
Non	Post-objective	Raster	Piezoelectric actuator based fiber scanner & galvanometer-driven mirror	Seibel (2001), ISOP	Confocal reflectance imaging [6]
Non	Pre-objective	Raster	2D electrostatic MEMS mirror scanner	Piyawattanametha (2006), OL	TPF [11]
Non	Non	Line	1D electromagnetic MEMS mirror scanner	Miller (1997), Opt Eng	[32]

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