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Micro and Nano Systems Letters
Fig. 3 | Micro and Nano Systems Letters

Fig. 3

From: Microscanners for optical endomicroscopic applications

Fig. 3

Microscanners for endomicroscopy. a Electrostatic gimbaled 2D MEMS mirror [27], b Electromagnetic 1D MEMS mirror [32], c 1D single-crystalline silicon MEMS mirror [35], (reproduced by permission of the Institution of Engineering & Technology) d spiral PZT scanner [7], e Lissajous fiber scanners using MTSO [14], f Lissajous scanned electrothermal MEMS fiber scanner [15], g electromagnetic MEMS microlens scanner [21], h electrostatic MEMS lens scanner [13]

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