Fig. 22
Reprinted from [103], © 2002 IOP Publishing, reproduced with permission
SEM images of the etched profile showing the lateral deviation of the etched hexagonal grooves
Fig. 22 | Micro and Nano Systems Letters
Reprinted from [103], © 2002 IOP Publishing, reproduced with permission
SEM images of the etched profile showing the lateral deviation of the etched hexagonal grooves