Fig. 17From: Determination of precise crystallographic directions for mask alignment in wet bulk micromachining for MEMSReproduced with permission from [110], © 2016 IOP PublishingThe patterns comprising of circular opening proposed by Sajal et al. for identifying the ⟨100⟩ direction on Si{100}: a schematic diagram b optical images of the arrangement of pre-etched pattern on diametrically opposite end of the wafer [109]. Table lists the details of the patternsBack to article page