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Table 1 Comparison of key features

From: Ultra low actuation voltage RF MEMS switch

Parameter Ref. [5] Ref. [6] This paper
Frequency (GHz) 50 2 0–3
Pull-in Voltage 4.5 15 0.5
Displacement (μm) 1.5 1.3 1.5
Transition Time 120 ns 7.4 μs 0.5 ms
Isolation (dB) 55 45.7 27
Insertion loss (dB) 0.5 0.25 0.1
Return loss (dB) 12.4 NA 20
1 V CMOS technology No No Yes
Life Cycle 8 × 108 1 × 107 1 × 104
Size 400 × 100 μm2 2000 × 1000 μm2 1264 × 635 μm2
(Lower contact pad) (SPDT) (Including biasing pads)