Figure 44

Schematic representation of different shapes corner compensation geometries namely (a) triangular, (b) rhombus or square, and (c) parallelogramic beam for the protection of convex corner during fabrication in {110} silicon wafers [128].
Schematic representation of different shapes corner compensation geometries namely (a) triangular, (b) rhombus or square, and (c) parallelogramic beam for the protection of convex corner during fabrication in {110} silicon wafers [128].