Figure 42From: A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching Fabrication of the (a) microstructure with bent V-grooves and (b) grooves for chip isolation in surfactant added 25 wt% TMAH using triangular shape compensation structure [ 120 ]. With permission from Elsevier, Copyright 2009.Back to article page