Figure 39From: A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching Fabrication of microstructures with bent V-grooves: (a) schematic view of bent V-groove in {100} wafer; (b) mask pattern with corner compensation structure; (c)-(d) fabricated structures [ 118 ] (with permission from Elsevier, Copyright 2006). Back to article page