Skip to main content
Figure 37 | Micro and Nano Systems Letters

Figure 37

From: A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching

Figure 37

Corner compensation design for the realization of bent V-groove using (a) <100> oriented beam where several <110> oriented narrow strips are added on both sides; (b) Dimensioning of the narrow strips; (c) Sequential V-grooves [92 ] (with permission from The Electrochemical Society, Copyright 1990); (d) Mesa structures surrounded by bent V-grooves fabricated in 40 wt% KOH.

Back to article page