Figure 27
Sequentially etched shape for a mesa structure with square compensating patterns in surfactant added 25 wt% TMAH [120]. With permission from Elsevier, Copyright 2009.
Figure 27 | Micro and Nano Systems Letters
Sequentially etched shape for a mesa structure with square compensating patterns in surfactant added 25 wt% TMAH [120]. With permission from Elsevier, Copyright 2009.