Figure 26
SEM pictures of mesa structures fabricated in (a) 40 wt% KOH and (b) 25 wt% TMAH at 70°C using square shape compensating geometry as shown in Figure 25 .
Figure 26 | Micro and Nano Systems Letters
SEM pictures of mesa structures fabricated in (a) 40 wt% KOH and (b) 25 wt% TMAH at 70°C using square shape compensating geometry as shown in Figure 25 .