Figure 17From: A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching Schematic representation of zone axis and its planes and the diagram of the etch rates of different planes in KOH type etchant for (a) <100> −zone and (b) <110>−zone which are utilized to predict the shape of etched profile using Wulff-Jaccodine method [4]. Back to article page