Figure 13From: A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching Schematic representation of concave and convex corners in {100} and {110} wafers. The close-up view of concave corner exhibiting silicon atoms of {111} surface with one dangling bonds, while the atoms belonging to the edge of concave corner do not contain any dangling bond. The close-up view of convex corner showing the tangent planes.Back to article page