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Micro and Nano Systems Letters
Figure 12 | Micro and Nano Systems Letters

Figure 12

From: A comprehensive review on convex and concave corners in silicon bulk micromachining based on anisotropic wet chemical etching

Figure 12

Etching characteristics of pure and surfactant (Triton X-100) added 25 wt% TMAH: (a)-(c) 3D distribution and 2D plot of the etch rates [38]; (d) etched profiles of the convex corners (e) undercutting ratio ( l /d) at different temperatures (f) Micromachining of alphabet letters in Si{100} using (i) pure TMAH and (ii) TMAH + Triton.

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