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Micro and Nano Systems Letters

Table 2 Properties and characteristics of SAW gyroscopes based on progressive waves

From: Gyroscopes based on surface acoustic waves

References

Author

Size (Substrate)

Frequency (MHz)

Sensitvity

Temperature compensation

[15]

Lee et al.

9 × 9 mm2 (ST-Quartz)

98.6

0.431 Hz/deg/s

Yes

[16]

Oh et al.

1.4 × 0.6 mm2 (128° LiNbO3)

80.2

52.35 Hz/deg/s

Yes

[18]

Wang et al.

- (128° LiNbO3)

434

2.42 deg/deg/s

Yes

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