Figure 3
From: Resonant-frequency tuning of angular vertical comb-driven microscanner
(a) Measured un-tuned and tuned resonant frequencies of the microscanner (3152 Hz and 3076 Hz) with a driving voltage of 10 V dc + 10 V ac . (b) Measured resonant-frequency shift as a function of the applied tuning dc voltages from 0 V to 30 V. The resonant frequency is shifted by 101 Hz from 3167 Hz for the un-tuned resonant frequency with a driving voltage of 20 Vdc + 10 Vac (red circles) and by 100 Hz from 3158 Hz with a driving voltage of 20 Vdc + 5 Vac (blue inverted triangles). The resonant-frequency shifts of 76 Hz from 3152 Hz and 75 Hz from 3149 Hz were respectively achieved with a driving voltage of 10 Vdc + 10 Vac (black squares) and with a driving voltage of 10 Vdc + 5 Vac for the un-tuned resonant frequency (green triangles).