Figure 1

SEM image of the AVC-driven microscanner. The microscanner consists of a rotor, two torsional springs, and two fixed electrodes. The single-crystal silicon torsional springs are plastically deformed such that the rotor including the micromirror and movable comb finger electrode has an initial tilt angle with respect to the stator electrodes. Two electrically isolated fixed electrodes including a driving electrode for actuation and a tuning electrode for tuning of the resonant frequency are symmetrically placed on both sides of the rotor with respect to the torsional springs.