Figure 4
From: A bulk-micromachined corner cube retroreflector with piezoelectric micro-cantilevers
Surface topograph of fabricated horizontal mirrors using PZT cantilever actuator with area of 150 ×150 μ m 2 (a) and 250 ×250 μ m 2 (b) by using Nanofocus uSurf 3D non-contact profiler.