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Figure 2 | Micro and Nano Systems Letters

Figure 2

From: A bulk-micromachined corner cube retroreflector with piezoelectric micro-cantilevers

Figure 2

Fabrication sequences of proposed MEMS CCR with silicon cross shaped vertical mirrors and horizontal mirrors with PZT cantilevers: (a) deposition of SiNx on a double SOI wafer, (b) formation of mask for KOH wet etching, and (c) KOH wet etching, (d) dicing and rotation, (e) deposition of SiNx/Ti/Pt/PZT/Pt on a silicon wafer, (f) formation of PZT cantilevers, horizontal mirrors, torsional hinge springs, and SU-8 micro-holder, (g) KOH wet etching for release, and (h) dicing and assembly of the vertical mirrors onto the horizontal mirrors.

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