The FEM simulations. (a) The electric field distribution on the electrode plane. (b) The electric field intensity on the electrode plane. Line 1 is on the 3D electrodes and line 2 is on the planar electrodes. The x axis of the simulation range is 0 μm to 1000 μm and the y axis are 100 μm on 3D electrodes and 300 μm on planar electrodes.