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Figure 3 | Micro and Nano Systems Letters

Figure 3

From: A simple and robust model to explain convex corner undercutting in wet bulk micromachining

Figure 3

Schematic representation of concave and convex corners: (a) masking pattern on {100}Si wafer, (b) anisotropically etched pattern assuming no-undercutting takes place at convex corners, (c) close-up view of concave corner exhibiting silicon atoms of {111} plane with one dangling bond, while the atoms belonging to concave corner do not contain any dangling bonds, (d) close-up view of convex corner showing silicon atoms of {111} plane and the convex corner with one dangling bond.

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